SVCS Process Innovation s.r.o
Equipment for semiconductor manufacturing and research. SVCS’s main products are atmospheric, LPCVD and PECVD thermal reactors for the production of silicon wafers.
Proprietary products and technologies
SV-Fur
Atmospheric/LPCVD/PECVD reactors for the semiconductor/photovoltaic industry and the R&D sector
SV-Fluid
Ultra-pure gas delivery, automated gas cabinets, boxes and panels
SV-Con
A modular control system for equipment in the semiconductor industry and beyond
Further tools for the delivery system
Batch processing and installation of gas, vapour and liquid media (connections)
Contacts
svcs.com
info@svcs.cz
Zámecká 133, Valašské Meziříčí